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Uniformed Surface Roughness Variation in PZT Grinding
 
When grinding PZT (piezoelectric zirconate titanate), which is commonly used as piezoelectric material, surface roughness varies among die on the surface. This variation can be reduced by applying “In-feed and Creep feed Grinding”.

Reducing the surface roughness variation in PZT grinding leads to the stability in the following features.
Converting pressure to electricity
Converting electricity to vibration and displacement
Converting electricity to vibration and then reconverting to electricity

Compared with in-feed grinding, creep-feed grinding is more effective as a measure to prevent surface roughness variation.
It is possible to reduce the surface roughness to about one fifth.
For details, refer to the below drawing.


Table 1: Surface roughness variation after in-feed and creep feed grinding


Figure 1: Surface roughness measurement points


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